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Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition
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Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition

Saroukhani, Z.

  1. DOI:10.1007/s12034-015-0982-0
  2. Main Entry: Saroukhani, Z.
  3. Title:Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition.
  4. Publisher:Indian Academy of Sciences, 2015.
  5. Abstract:Barium strontium titanate (BST, Ba1-xSrxTiO3) thin films have been extensively used in many dielectric devices such as dynamic random access memories (DRAMs). To optimize its characteristics, a microstructural control is essential. In this paper, Ba0.6Sr0.4TiO3 thin film has been deposited on the SiO2/Si substrate by the pulsed laser deposition (PLD) technique at three different oxygen working pressures of 100, 220 and 350 mTorr. Then the deposited thin films at 100 mTorr oxygen pressure were annealed for 50 min in oxygen ambient at three different temperatures: 650, 720 and 800°C. The effect of oxygen working pressure during laser ablation and thermal treatment on the films was investigated by using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) analysis methods. X-ray photoelectron spectroscopy analysis was used to determine the surface chemical composition of the samples. The results indicate that the deposited BST film at low working pressure (100 mTorr) in PLD chamber shows a lower surface roughness than other working pressures (220 and 350 mTorr). The as-deposited films show an amorphous structure and would turn into polycrystalline structure at annealing temperature above 650°C. Increase of temperature would cause the formation of cubic and perovskite phases, improvement in crystalline peaks and also result in the decomposition of BST at high temperature (above 800°C). In addition, rising of temperature leads to the increase in size of grains and clusters. Therefore more roughness was found at higher temperatures as a result of a more heterogeneous growth and less tensions
  6. Notes:Sharif Repository
  7. Subject:Ferroelectric.
  8. Subject:Pulsed laser deposition.
  9. Subject:Amorphous films.
  10. Subject:Amorphous materials.
  11. Subject:Annealing.
  12. Subject:Atomic force microscopy.
  13. Subject:Barium.
  14. Subject:Barium compounds.
  15. Subject:Chemical analysis.
  16. Subject:Deposition.
  17. Subject:Dielectric devices.
  18. Subject:Dynamic random access storage.
  19. Subject:Ferroelectric materials.
  20. Subject:Laser ablation.
  21. Subject:Oxygen.
  22. Subject:Pressure effects.
  23. Subject:Programmable logic controllers.
  24. Subject:Pulsed laser deposition.
  25. Subject:Pulsed lasers.
  26. Subject:Random access storage.
  27. Subject:Scanning electron microscopy.
  28. Subject:Strontium.
  29. Subject:Strontium titanates.
  30. Subject:Surface roughness.
  31. Subject:Thin films.
  32. Subject:Titanium compounds.
  33. Subject:X ray diffraction.
  34. Subject:X ray photoelectron spectroscopy.
  35. Subject:Amorphous structures.
  36. Subject:Annealing temperatures.
  37. Subject:Barium-strontium titanate films.
  38. Subject:Dynamic random access memory.
  39. Subject:Heterogeneous growth.
  40. Subject:Microstructural control.
  41. Subject:Polycrystalline structure.
  42. Subject:Surface chemical composition.
  43. Subject:Barium strontium titanate.
  44. Added Entry:Tahmasebi, N.
  45. Added Entry:Mahdavi, S. M.
  46. Added Entry:Nemati, A.
  47. Added Entry:Sharif University of Technology.
  48. Source: Bulletin of Materials Science ; Volume 38, Issue 6 , 2015 , Pages 1645-1650 ; 02504707 (ISSN)
  49. Web Site:http://link.springer.com/article/10.1007%2Fs12034-015-0982-0

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