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Introduction to microelectromechanical microwave systems
Santos, Hector J. de los.
- Call Number : TK 7876 .S28 2004
- Main Entry: Santos, Hector J. de los.
- Title:Introduction to microelectromechanical microwave systems [electronic resource] / Héctor J. de los Santos.
- Edition:2nd ed.
- Publisher:Boston : Artech House, 2004.
- Physical Description:xiii, 221 p. : ill. ; 24 cm
- Series:Microelectromechanical systems series
- Notes:Includes bibliographical references and index
- Subject:Microwave devices.
- Subject:Microelectromechanical systems.
Introduction to Microelectromechanical Microwave Systems Second Edition
- Introduction to Microelectromechanical Microwave Systems
- Contents
- Preface xi
- Acknowledgments xxi
- 1 Microelectromechanical Systems 1
- 2 Fundamental MEMS Device Physics 25
- 3 Fundamental MEMS Devices: The MEM Switch 59
- 4 Fundamental MEMS Devices: The MEM Resonator 87
- 5 Microwave MEMS Applications 121
- 6 MEMS-Based Microwave Circuits and Systems 173
- Glossary 209
- About the Author 211
- Index 213
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